Mechanical Systems Engineering Laboratories

Micro-Nano Mechatronics Laboratory

Basic Information

Staff

Professor Minoru Sasaki / Associate Professor Shinya Kumagai

Outline

Small valuable devices : Micro-/nano-machines and related technology

Mechatronics is the field combining the mechanics with the electronics. When the size decreases, shapes, processes, and materials give the important meanings combining with the mechanics and the electronics. We are making every effort for realizing new sensors, actuators, and micro-/nano-devices including three-dimensional integration.

Research Themes

Three-dimensional photolithography including vertical side walls
Bottom-up processes using nano-particles
MEMS infrared sensors
Wearable Sensors

Website

http://www.toyota-ti.ac.jp/mems/index.htm

Equipment

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White light interferometer

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Activities

We are attending the MEXT Nanotechnology Platform Project (start from 2012.7).
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Miscellaneous

Banquet photo in Sapporo
(IEEE International Conference on Optical MEMS and Nanophotonics 2010)
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