MEMS and NEMS, 3D fabrication techniques, Sensors

[Professor] Minoru Sasaki

Basic Information

Minoru Sasaki

Degree

Dr. Eng.

Date of birth

1968/12/27

Laboratory Name

Micro/Nano Mechatronics

Research Fields

MEMS and NEMS, 3D fabrication techniques, Sensors

Website

http://www.toyota-ti.ac.jp/mems/index.htm

E-mail Address

Academic Background

Nagoya University

Work History

Toyota Technologcical Institute, Professor (2007.4-present)
Tohoku University, Associate Professor (2001.11-2007.3)
Tohoku University, Lecturer (2000.7-2001.10)
Tohoku University, Assistant Professor (1996.1-2000.6)
PD Research Fellow with the Japan Society for the Promotion of Science(1995.4-1995.12)

Membership of Academic Societies

* General Chair of IEEE International Conference on Optical MEMS and Nanophotonics (2013.8.19-22, Kanazawa, Japan) in schedule.
* Program Committee of the 4th International Conference on PLAsma-Nano Technology & Science (2011.3.10-12).
* Organizing Committee, Program Committee of 3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (2011-)
* International Organizing Committee of 7th International Conference on Reactive Plasmas (2010.10.4-8, Maison de la Chimie, Paris, France).
* Technical Program Chair of IEEE/LEOS International Conference on Optical MEMS (2010.8.9-12, Sapporo, Japan).
* Program Committee of International Symposium on Advanced Plasma Science and its Applications (2010-)
* Steering Committee of IEEE/LEOS International Conference on Optical MEMS, 2007-2012.
* Program Committee of Solid State Devices and Materials, Area: Micro-Nano Electromechanical/Bio Conjugated Systems, 2007-2012.
* Guest Editor of Journal of Optics A: Pure and Applied Optics, Vol. 10, Number 4, 2008, Selected papers from Optical MEMS and Nanophotonics 2007.

Social Activities

The Japan Society of Mechanical Engineers, Tokai Branch "High-Tech Ivent for Elementary or Junior High School Students" (attended 2011.8.2)

Research Themes

3D photolithography and its application
Atmospheric micoplasma and MEMS application
Thermal-type infrared detector
Wavelength selective infrared emitter
Wearable sensor

Original Papers

[Academic Year]2012
[Articles]Infrared collecting lens having millimeter-size diameter integrated with Si photo cell
[Author]Takuro Aonuma, Shinya Kumagai, Minoru Sasaki
[Date of Issue]2012.5.1
[journal]IEEJ Transuctions on Sensors and Micromachines E Vol. 132, No. 5 (2012) pp.119-126.


[Academic Year]2012
[Articles]Investigation of Optical Flatness of Stretched Membrane Drum-Type Micromirror
[Author]Subrata Kumar Kundu, Akiyoshi Hikita, Shinya Kumagai, Minoru Sasaki
[Date of Issue]2012.5.15
[journal]IEEE/OSA Journal of Lightwave Technology, vol. 30, no. 10, (2012.5.15) pp. 1377-1385.


[Academic Year]2012
[Articles]Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation
[Author]Shinya KUMAGAI, Narimune OHNISHI, Minoru SASAKI
[Date of Issue]2012.1.31
[journal]Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol. 6, No. 1 (2012) pp.1-10.


[Academic Year]2012
[Articles]Improving Photoresist Spray Coating Using A Shield Plate with An Aperture toward Trench-type Three Dimensional Microdevices
[Author]Shinya Kumagai, Naoya Fukuda, Hisayoshi Tajima and Minoru Sasaki
[Date of Issue]2012.1.25
[journal]Japanese Journal of Applied Physics, Vol. 51 (2012) 02BL04.


[Academic Year]2012
[Articles]Floating Wire for Enhancing Ignition of Atmospheric Pressure Inductively Coupled Micro Plasma
[Author]Shinya Kumagai, Hirotaka Asano, Masaru Hori, Minoru Sasaki
[Date of Issue]2012.1.25
[journal]Japanese Journal of Applied Physics, Vol. 51 (2012) 01AA01.


[Academic Year]2011
[Articles]Multi-Wavelength Selective IR Emission Using Surface Plasmon Polaritons for Gas Sensing
[Author]Katsuya Masuno, Takahiro Sawada, Shinya Kumagai, Minoru Sasaki
[Date of Issue]2011.8.30
[journal]IEEE Photonics Technology Letters, Vol. 23, No. 22 (2011) 1661-1663.

Reviews

[Academic Year]2011
[Articles]"Report on 16th International Conference on Optical MEMS and Nanophotonics 2011", IEEJ Transuctions on Sensors and Micromachines E Vol. 131, No. 12 (2011) p.1.
[Author]Minoru Sasaki
[Date of Issue]2011/12


[Academic Year]2011
[Articles]"Basics of resist process", IEEJ Transuctions on Sensors and Micromachines E Vol. 131, No. 5 (2012) pp.119-126.
[Author]Minoru Sasaki
[Date of Issue]2011/5

Books

[Academic Year]2012
[Books](chapter 2, section 10) Etching Technology / Basics and Applications of Hetero Functional Device Integration Technology
[Author/Editor]Minoru Sasaki / Kazuya Masu, Hiroshi Toshiyoshi, Katsuyuki Machida
[Date of Issue]in press


[Academic Year]2010
[Books]“Next-Generation Actuators Leading Breakthroughs”
Springer, ISBN978-1- 84882-990-9
Part III, Micro Actuators, 11. High-Performance Electrostatic Micromirrors, pp.117-128.
Minoru Sasaki
[Author/Editor]Minoru Sasaki / Toshiro Higuchi, Koichi Suzumori, Satoshi Tadokoro
[Date of Issue]2010/1


[Academic Year]2007
[Books]"Comprehensive Microsystems - Fundamentals,technology and applications-"
Elsevier Science Ltd. (2007.12.24), ISBN-13: 978-0-444-52194-1
Volume Three, 3.01 Optical systems: Micro-mirrors, pp.1-63.
[Author/Editor]Kazuhiro Hane, Minoru Sasaki / Yogesh Gianchandani, Osamu Tabata, Hans Zappe
[Date of Issue]2007/12

Conference Presentations

[Academic Year]2012
[Academic Society]3-D WIRING ACROSS VERTICAL SIDEWALLS OF SI PHOTO CELLS FOR SERIES CONNECTION AND HIGH VOLTAGE GENERATION
The 25th International Conference on Micro Electro Mechanical Systems (2012.1.31, Paris, France), Oral Session IV - Fabrication, pp.60-63.
[Speakers]S. Kumagai, T. Yamamoto, H. Kubo, M. Sasaki
[Date of Presentation]2012.1.31


[Academic Year]2011
[Academic Society]”Multi-wavelength Selective IR emitter Using Surface Plasmon Polaritons for CO2 Gas Sensing”, Proceedings of International Workshop on Micro/Nano-Engineering (2011.12, 京都) 47-48.
[Speakers]T. Sawada, K. Masuno, S. Kumagai, M. Sasaki
[Date of Presentation]2011.12


[Academic Year]2011
[Academic Society]MEMS Resonator Improved by Controlling Generation of Crystallization Nuclei in Si Thin Film Structure
Proceedings of the 18th International Display Workshops, Vol. 2, MEET5-5, pp.1231-1234.
[Speakers]S. Kumagai, H. Murase, S. Miyachi, I. Yamashita, Y. Uraoka, M. Sasaki
[Date of Presentation]2010.12.8


[Academic Year]2011
[Academic Society]Evaluation of Stress Concentration and Deformation of Drum-Type Micromirror
Proceedings of the 18th International Display Workshops, Vol. 2, MEET5-3, pp.1223-1226.
[Speakers]S. K. Kundu, A. Hikita, S. Kumagai, M. Sasaki
[Date of Presentation]2010.12.8


[Academic Year]2011
[Academic Society]Ignition Characteristics Relating with Shape of Floating Electrode in Micro ICP source
Plasma Conf., 22P006-0
[Speakers]H. Asano, Y. Yokoyama, H. Matsuyama, R. Sato, S. Kumagai and M. Sasaki
[Date of Presentation]2011.11.22

Invited Lectures

[Academic Year]2012
[Lecture]Micromachining techniques for wider variety of 3D devices,
25th International Microprocesses and Nanotechnology Conference
October 30 - November 2, 2012, Kobe Meriken Park Oriental Hotel, Kobe, Japan
[Speakers]Minoru Sasaki, Shinya Kumagai
[Date of Lecture]in schedule


[Academic Year]2011
[Lecture]Electromagnetically Energized Wireless Driving of Micromirror
The 9th International Displays Research Workshop (IDRW’11) in conjunction with The 5th International Nanotechnology/MEMS Seminar, pp. S4-1-1 - S4-1-9
2011.12.6, Sanaru Hall, Shizuoka University
[Speakers]S. Kumagai, N. Ohnishi, M. Sasaki
[Date of Lecture]2011/12/6


[Academic Year]2011
[Lecture]Reflection-type Wavelength Selective IR Emitter Using Surface Plasmon Polariton for Gas Sensing
The 3rd International Workshop on Nanotechnology and Application - IWNA 2011
(12, November 2011, Vung Tau, Vietnam) NMD-261-I, pp.107-110.
[Speakers]Minoru Sasaki, Shinya Kumagai
[Date of Lecture]2011/11/12


[Academic Year]2010
[Lecture]Nonlinear Spring of Thin Film Torsion Bar with Tension for Micromirror
Proceedings of The 17th International Display Workshops, MEET2-3 (2010.12.2, Hakata, Japan) pp.1581-1584.
[Speakers]Shouhei Ogawa, Shinya Kumagai, Minoru Sasaki
[Date of Lecture]2010/12/2


[Academic Year]2009
[Lecture]Tensile Thin Film for MEMS Devices
Taiwan-Japan Bilateral Symposium on Research of Nanotechnology (2009.12.1-2
National Cheng Kung University, Taiwan)
[Speakers]Minoru Sasaki
[Date of Lecture]2009/12/1

Awards

[Academic Year]2010
[prize]Best Paper Award in 2010 International Symposium on Micro-NanoMechatronics and Human Science (MHS2010)
“Controlled Thermal Emission of Narrow-band IR Waves for Patient Monitoring Outside the Hospital”
[Prize Winner]Katsuya Masuno, Shinya Kumagai, Minoru Sasaki
[Award-Winning Date]2010


[Academic Year]2004
[prize]2004 best paper award of Japan Society of Mechanical Engineers
"Development of atomic force microscope combined with laser microscope for measureing the mechanical property of cell"
[Prize Winner]Nagayama, 長山和亮,Minoru Sasaki, Kazuhiro Hane, Toshiro Matsumoto, Masaaki Sato
[Award-Winning Date]2005/4/8

Miscellaneous

[Academic Year]2009.4-2011.3
Chair of "Application study of Micro-systems" JST inovation plasa Tokai

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