World of small and useful machines


Mechatronics is the region combining the mechanics and the electronics.

In the micro/nano-devices prepared using the microfabrication, the both factors become important for realizing the functions.

This region is progressing in a quick speed at now.

Our interests are realizing new functions taking the stand point utilizing the micromachining techniques and microdevices.


Present efforts are focusing on the following regions.

1.      Micromachining especially for realizing 3D structures

2.      Micro-plasma (processing and devices)

3.      Micro-devices especially for optical and IR applications


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revision: 7 January 2017