Mechanical Systems Engineering Laboratories

Micro-Nano Mechatronics Laboratory

Basic Information

Staff

Professor Minoru Sasaki

Outline

Small valuable devices : Micro-/nano-machines and related technology

Mechatronics is the field combining the mechanics with the electronics. When the size decreases, shapes, processes, and materials give the important meanings combining with the mechanics and the electronics. We are making every effort for realizing new sensors, actuators, and micro-/nano-devices including three-dimensional functional surface.

Research Themes

Photolithography on three-dimensional samples
Atomospheric microplasma and MEMS
Resonator-type sensors,wearable sensors
Optical MEMS devices

Website

http://www.toyota-ti.ac.jp/mems/index.htm

Equipment

mems01.jpg

White light interferometer


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Miscellaneous

Photo at graduation at March 2022.

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